UF is proud to offer a hands-on semiconductor-device microfabrication-laboratory course that provides many unique learning experiences:
- Students will gain hands-on experience with (and appreciate the capabilities and limitations of) the following semiconductor microfabrication processes equipment through weekly laboratory experiments:
- Photolithography equipment (spinners, exposure tools)
- Thin-film deposition (thermal evaporation, sputtering)
- Thin-film wet and dry (plasma-based) etching
- Material characterization (4-point probe, Hall Effect)
- Device Characterization (CV)
- Computer-Aided Design (CAD) software for device layout
- Students will learn about the use of design rules for the fabrication of integrated circuits (IC), micro-electro-mechanical systems (MEMS), and other chip-scale devices.
- Students will learn about the methods and importance of the Design of Experiments (DOE) and other statistical analyses used to maximize the success and minimize the costs of semiconductor-device manufacturing.
- Students will learn and practice safe laboratory and chemical-handling principles and practice good teamwork principles.
Students interested in this course (EEE 5354L) should be aware of the following
- The registration process for this off-book course is different (see the attached document for the instructions and forms needed).
- The cost per unit for this course is not the same as that for other courses (see the attached document for the rate information)