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SEM
JSM 6400 Specifications and Capabilities
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Resolution (Secondary Electron Image)
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3.5 nm (at
35 KV- 8 mm WD) 10.0 nm (at 35.0 KV - 39 mm WD) |
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Accelerating Voltage
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0.2 to 40 KV |
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Magnification
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10X to 300,000X |
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Imaging Modes
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SEI, BEI, ECP |
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Lens System
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Electro-magnetic lens system |
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Specimen Stage
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X=50 mm, Y=70 mm, Z=8-15-25-39-48 mm |
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Tilting
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-5 to +90 degrees |
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Rotation
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360 degrees (endless) |
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Digital Image
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Up to 1024 x 1024pixels |
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Image Selector
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SEI, COMPO, TOPO, EDS, AUX, image processing |
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Auto Functions
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AFD (Auto Focus), ACB (Auto Contrast and Brightness Control), ASD (Auto Stigmator) |